Electronic component handling apparatus and electronic component testing apparatus

ABSTRACT

An electronic component handling apparatus handles a device under test (DUT). The electronic component handling apparatus includes: transfer units that each include a DUT transfer part that mounts the DUT on a first tray and removes the DUT from the first tray; contact units that each press the DUT mounted on the first tray against a socket disposed on a test head connected to a tester; and a tray transporter that transports the first tray between the contact units and the transfer units. Either or both of (i) at least one of the contact units and (ii) at least one of the transfer units are removably disposed on the electronic component handling apparatus.

CROSS-REFERENCE TO RELATED APPLICATIONS

The present application claims priority from Japanese Patent ApplicationNo. 2020-124724 filed on Jul. 21, 2020, the contents of which areincorporated herein by reference in their entirety.

BACKGROUND Technical Field

The present invention relates to an electronic component handlingapparatus and an electronic component testing apparatus that are used inthe test of the electronic component under test (DUT: device under test)such as a semiconductor integrated circuit device.

DESCRIPTION OF THE RELATED ART

The electronic component handling device used for the DUT test includesa loader part, a chamber part, and an unloader part (see, for example,Patent Document 1). The loader part transfers the untested DUT from thecustomer tray to the test tray and feeds the test tray to the chamberunit. The chamber part tests the DUT in a state where the DUT is mountedon the test tray by applying a predetermined thermal stress to the DUTand pressing the DUT to a socket disposed on the test head. The unloaderpart transfers the tested DUT from the test tray to the customer traywhile classifying the tested DUT according to the test result.

Patent Document

-   Patent Document 1: JP 2014-006097 A

The above-mentioned electronic component handling apparatus hasspecifications that comprehensively satisfy many needs in the market.Further, since the above-mentioned electronic component handlingapparatus is composed of a single frame, a major modification may berequired to change the specifications. For this reason, thespecification of the electronic component handling apparatus becomesover-specification with respect to the requirements of individual usersand the cost of the electronic component handling apparatus is increasedfor optimization of the specification.

SUMMARY

One or more embodiments of the present invention provide an electroniccomponent handling apparatus capable of optimizing the specifications ata low cost with respect to the user's requirements, and an electroniccomponent test apparatus having the same.

[1] An electronic component handling apparatus according to one or moreembodiments of the present invention is an electronic component handlingapparatus that handles a DUT, the electronic component handlingapparatus comprising: contact units each of which presses the DUT to asocket disposed on a test head connected to a tester in a state wherethe DUT is mounted on a first tray; transfer units each of whichincludes a DUT transfer part that mounts the DUT on the first tray ortake out (remove) the DUT from the first tray; and a tray transport unit(i.e., tray transporter) that transports the first tray between thecontact units and the transfer units, and the electronic componenthandling apparatus is configured so that at least one of the contactunit and the transfer unit is added to or removed (subtracted) from theelectronic component handling apparatus.

[2] In one or more embodiments, the DUT transfer part may be disposedabove the tray transport unit.

[3] In one or more embodiments, the contact units may be arranged alonga first direction that is substantially parallel to a horizontaldirection, the transfer units may be arranged along the first direction,and the tray transport unit may transport the first tray along the firstdirection.

[4] In one or more embodiments, the DUT transfer part may include afirst tray moving device that delivers and receives the first tray toand from the tray transfer unit in a vertical state.

[5] In one or more embodiments, the first tray moving device may movethe first tray along a longitudinal direction of the first tray.

[6] In one or more embodiments, the tray transport unit may include atray holding device that is capable of holding the first tray in avertical state.

[7] In one or more embodiments, the DUT transfer part may include aposture changing device that changes a posture of the first tray betweena horizontal state and a vertical state.

[8] In one or more embodiments, the posture changing device may changethe posture of the first tray by raising or lowering a first side of thefirst tray while horizontally moving a second side facing the first sidein the first tray in a state where the position of the first side ismaintained in the horizontal direction.

[9] In one or more embodiments, the transfer unit may include a traystorage part (i.e., tray storage) that stores a second tray, and the DUTtransfer part may transfer the DUT between the first tray and the secondtray.

[10] In one or more embodiments, the DUT transfer part may be disposedabove the tray storage part.

[11] In one or more embodiments, the tray storage part may include:first holding devices that hold the second tray; and a second traymoving device that moves the second tray between the first holdingdevices.

[12] In one or more embodiments, the transfer units adjacent to eachother may include a third tray moving device that is disposed betweenthe tray storage parts and moves the second tray, the operating range ofthe third tray moving device may vertically overlap both operatingranges of the second tray moving devices of the transfer units adjacentto each other.

[13] In one or more embodiments, the transfer units may include: aloader unit (i.e., loader) that includes a loader part that transfersthe untested DUT from a second tray to the first tray; and an unloaderunit (i.e., unloader) that includes an unloader part that transfers thetested DUT from the first tray to the second tray.

[14] In one or more embodiments, the number of loader units that isincluded in the electronic component handling apparatus may be differentfrom the number of unloader units that is included in the electroniccomponent handling apparatus.

[15] In one or more embodiments, each of the contact units may becapable of adjusting a temperature of the DUT independently from otherof the contact units and pressing the DUT to a socket disposed on thetest head independently from other of the contact units, and theelectronic component handling apparatus may be configured so that thecontact unit is added to or removed from the electronic componenthandling apparatus.

[16] In one or more embodiments, the DUT transfer part may transfer theDUT between a first tray and a second tray.

[17] In one or more embodiments, the tray transport unit may transportthe first tray in a vertical state.

[18] In one or more embodiments, the tray transport unit may transportthe first tray along a direction substantially parallel to a mainsurface of the first tray.

[19] In one or more embodiments, the tray transport unit may receive anddeliver the first tray from and to the transfer unit in a vertical stateand may deliver and receive the first tray to and from the contact unitin a vertical state.

[20] In one or more embodiments, the contact units may be arranged alonga first direction that is substantially parallel to a horizontaldirection, and the tray transport unit may transport the first trayalong the first direction in a state where a main surface of the firsttray is substantially parallel to the first direction.

[21] In one or more embodiments, the tray transport unit may include: arail disposed along a first direction that is an arrangement directionof the contact units; and a moving part that is capable of moving on therail, and the moving part may include a tray holding device that iscapable of holding the first tray.

[22] In one or more embodiments, the tray holding device may be capableof holding the first tray in a vertical state.

[23] In one or more embodiments, the tray holding device may move thefirst tray along the normal direction of the first tray to carry thefirst tray into and out of the contact unit.

[24] In one or more embodiments, the moving part may include a drivingdevice that moves the tray holding device on the rail.

[25] In one or more embodiments, the driving device may include a rotarymotor having a rotary shaft to which a pinion gear is attached, and thetray transport unit may include a rack gear that is disposed in parallelwith the rail and that the pinion gear is engaged with.

[26] In one or more embodiments, the contact unit may include: a heatapplying section that applies a heat stress to the DUT; a pressingsection that presses the DUT to the socket; and a heat removing sectionthat removes the heat stress from the DUT, the heat applying section,the pressing section, and the heat removing section may be arrangedalong a vertical direction, the heat applying section may be arrangedbelow the pressing section, and the heat removing section may bearranged above the pressing section.

[27] In one or more embodiments, the contact unit may include a fourthtray moving device that moves the first tray from the heat applyingsection to the pressing section and moves the first tray from thepressing section to the heat removing section.

[28] In one or more embodiments, the fourth tray moving device may movethe first tray along a longitudinal direction of the first tray.

[29] In one or more embodiments, the pressing section may include apressing device that presses the DUT horizontally to the socket in astate where the first tray is in a vertical state, the fourth traymoving device may move the first tray in a vertical state, and thecontact unit may include: a fifth tray moving device that moves thefirst tray in a vertical state along a second direction that is a normaldirection of the first tray in the heat applying section; and a sixthtray moving device that moves the first tray in a vertical state along athird direction that is opposed to the second direction in the heatremoving section.

[30] In one or more embodiments, the contact unit may include an accesssection that allows the first tray to be moved in and out of the contactunit, the heat removing section, the access section, and the heatapplying section may be arranged along a vertical direction, the heatapplying section may be arranged below the access section, the heatremoving section may be arranged above the access section, and the traytransport unit may carry the first tray into and out of the contact unitin a vertical state via the access section.

[31] In one or more embodiments, the contact unit may include a seventhtray moving device that moves the first tray from the heat removingsection to the access section in a vertical state and moves the firsttray from the access section to the heat applying section in a verticalstate.

[32] An electronic component testing apparatus according to one or moreembodiments of the present invention is an electronic component testingapparatus that tests a DUT, comprising: the above-described electroniccomponent handling apparatus; test heads that are mounted to the contactunits; and a tester electrically that is connected to the test heads.

[33] In one or more embodiments, the test heads may be connected to thesingle tester.

In one or more embodiments, the electronic component handling apparatusis configured so that at least one of the contact unit and the transferunit is added to or removed from the electronic component handlingapparatus. As a result, since it is possible to configure the electroniccomponent handling apparatus by combining units that are optimal for theuser's request, it is possible to optimize the specification of theelectronic component handling apparatus for the user's request at lowcost.

BRIEF DESCRIPTION OF DRAWINGS

FIG. 1 is a perspective view showing the electronic component testingapparatus in one or more embodiments of the present invention.

FIG. 2 is a cross-sectional view showing the electronic componenttesting apparatus in one or more embodiments of the present inventionand is a cross-sectional view taken along II-II line of FIG. 1 .

FIG. 3 is a diagram showing a flow of a test tray in the handler in oneor more embodiments of the present invention.

FIG. 4 is a cross-sectional view showing the internal structure of theloader unit in one or more embodiments of the present invention.

FIG. 5 is a front view showing the internal structure of the loader unitand the unloader unit in one or more embodiments of the presentinvention and is a front view of the tray storage part seen along theV-V line of FIG. 4 .

FIG. 6 is a plan view showing the inner structure of the loader unit inone or more embodiments of the present invention and is a plan view ofthe loader part seen along VI-VI line of FIG. 4 .

FIG. 7 is a plan view showing a tray return device that returns emptytest trays from the unloader unit to the loader unit in one or moreembodiments of the present invention.

FIG. 8 is a perspective view showing a tray transport unit and contactunits in one or more embodiments of the present invention.

FIG. 9 is a side view showing a tray transport unit in one or moreembodiments of the present invention.

FIG. 10 is a front view showing a tray transport unit in one or moreembodiments of the present invention.

FIG. 11 is a cross-sectional view showing an internal structure of thecontact unit in one or more embodiments of the present invention.

FIG. 12A is a diagram showing a handler configured to correspond to 1024simultaneous measurement number, and FIG. 12B is a diagram showing ahandler configured to correspond to 768 simultaneous measurement number.

FIG. 13A is a diagram showing a handler including two loader units, andFIG. 13B is a diagram showing a handler including two unloader units.

DETAILED DESCRIPTION

Hereinafter, embodiments of the present invention will be described withreference to the drawings. FIG. 1 is a perspective view showing theelectronic component testing apparatus in one or more embodiments. FIG.2 is a cross-sectional view showing the electronic component testingapparatus in one or more embodiments and is a cross-sectional view takenalong II-II line of FIG. 1 . FIG. 3 is a diagram showing a flow of atest tray in the handler in one or more embodiments.

Electronic component testing apparatus 1 in one or more embodiments isan apparatus that tests the electrical properties of DUT 200 in a stateof applying a high-temperature or low-temperature thermal stress to theDUT 200 (or a state of room temperature (normal temperature)) andclassifies the DUT 200 according to the test results. As a specificexample of the DUT 200 to be tested, a memory device can be exemplified.The DUT 200 to be tested by the electronic component testing apparatus 1is not particularly limited to the above described as long as it is anelectronic component, and it may be, for example, a SoC (System on achip) or a logic device.

As shown in FIGS. 1 and 2 , the electronic component testing apparatus 1includes four test heads 5A to 5D (see FIGS. 3 and 12A), one tester(main frame) 7, and handler 10. As will be described later, the numberof test heads included in the electronic component testing apparatus isnot particularly limited to the above described. The electroniccomponent testing apparatus may include a plurality of testers. Thehandler 10 corresponds to an example of the “electronic componenthandling apparatus” in one or more embodiments of the present invention.

The test head 5A to 5D has a plurality of sockets 6 to each of which theDUT 200 is electrically connected at the time of testing. The test heads5A to 5D are respectively mounted to the contact units 60A to 60D of thehandler 10 with the sockets 6 facing horizontally. Each of the testheads 5A to 5D enters the first chamber 601 through an opening 63 aformed in the contact unit 60A to 60D so that the sockets 6 face thepressing device 631 of the contact unit 60A to 60D.

In one or more embodiments, all of the test head 5A to 5D arerespectively connected to the same one tester 7 through the cable 8. Thetester 7 performs testing of the DUT 200 by sending a test signal to theDUT 200 through the test head 5A to 5D in a state where the pressingdevice 631 of the contact unit 60A to 60D presses the DUT 200 to thesocket 6.

In one or more embodiments, the total number of sockets 6 included inthe four test heads 5A to 5D is the same as the number of DUTs that canbe simultaneously tested by one tester 7. Although not particularlylimited, for example, when the simultaneous measurement number of thetester 7 is 1024, the number of sockets 6 included in each test head 5Ato 5D is 256. The number of sockets included in each of test heads maybe different from each other.

The handler 10 in one or more embodiments is an apparatus that transfersthe DUT 200 from a customer tray (or second tray) 100 to a test tray (orfirst tray) 110 and presses the DUT 200 to the socket 6 of the test head5A to 5D in a state where the DUT 200 is mounted on the test tray 110.The handler 10 includes two transfer unit 20A and 20B (a loader unit 20Aand an unloader unit 20B), a tray transport unit 50, and four contactunit 60A to 60D, as shown in FIGS. 1 to 3 .

Here, the customer tray 100 is a tray for transporting a plurality ofDUTs 200 between a process using the handler 10 and other process. Thecustomer tray 100 is a plate-shaped tray made of a resin material or thelike. The customer tray 100 has a plurality of pockets arranged in amatrix, and each pocket has a concave shape capable of accommodating theDUT 200. The untested DUT 200 is carried into the handler 10 from thepreceding process while being mounted on the customer tray 100. Thetested DUT 200 is carried out from the handler 10 to the post-processwhile being mounted on the customer tray 100.

On the other hand, the test tray 110 is a tray that is circularlytransported in the handler 10 while accommodating a plurality of DUTs200. The test tray 110 includes a frame and a plurality of inserts 111(refer to FIG. 6 ) movably held by the frame. The plurality of inserts111 are arranged in a matrix so as to correspond to the arrangement ofthe sockets 6 of the test head 5A to 5D, and the plurality of inserts111 can respectively accommodate the DUTs 200. The testing of DUTs 200is performed by pressing the DUTs 200 to the sockets 6 by the pressingdevice 631 in a state where the DUTs 200 are accommodated in the inserts111 of the test tray 110. At this time, since the inserts 111 aremovably held by the frame, the plurality of DUTs 200 can be positionedindependently from each other with respect to the sockets 6.

The loader unit 20A of the handler 10 transfers the untested DUT 200from the customer tray 100 to the test tray 110 and supplies the testtray 110 to the tray transport unit 50. The tray transport unit 50transports the test tray 110 to any of the contact units 60A to 60D.

Then, the contact unit 60A to 60D presses the DUT 200 to the socket 6while being mounted on the test tray 110 after applying a predeterminedthermal stress of high temperature or low temperature to the DUT 200,and then, the tester 7 executes a test of the DUT 200.

At this time, as described above, since the test heads 5A to 5D areindividually mounted to the four contact units 60A to 60D, the contactunit (e.g., the contact unit 60A) can press the DUTs 200 to the sockets6 independently from the other of the contact units (e.g., the contactunits 60B to 60D).

Further, in one or more embodiments, as shown in FIG. 3 , since thetemperature adjusting devices 621A to 621D are individually connected tothe four contact units 60A to 60D, the contact unit (e.g., the contactunit 60A) can adjust the temperature of the DUTs 200 independently fromthe other of the contact units (e.g., the contact units 60B to 60D).

Therefore, in one or more embodiments, the contact unit (e.g., thecontact unit 60A) can execute the test independently from the othercontact units (e.g., the contact units 60B to 60D). The four contactunits 60A to 60D may perform tests of the same content or may performtests of different content from each other. The four contact units 60Ato 60D may perform tests under the same temperature condition or mayperform tests under different temperature conditions from each other.

The test tray 110 on which the tested DUTs 200 are mounted is dischargedfrom the contact unit 60A to 60D to the tray transport unit 50, and thetray transport unit 50 transports the test tray 110 to the unloader unit20B. The unloader unit 20B transfers the tested DUT 200 from the testtray 110 to the customer tray 100 while classifying the tested DUT 200according to the test result.

The tray transport unit 50 may transport the test tray 110 on which thetested DUTs 200 are mounted from the contact unit (e.g., the contactunit 60A) to another contact unit (e.g., one of the contact units 60B to60D). Thus, a plurality of types of tests can be performed on the sameDUT 200 by the same handler 10.

In one or more embodiments, the device frames of the four contact units60A to 60D are independently separated from each other. The four contactunits 60A to 60D are arranged along the X-direction. Similarly, thedevice frames of the two transfer units 20A and 20B are alsoindependently separated from each other. The two transfer units 20A and20B are also arranged along the X-direction. The X direction correspondsto an example of the “first direction” in one or more embodiments of thepresent invention.

The device frames of the tray transport unit 50 are also separatedindependently from the transfer units 20A and 20B and the contact units60A to 60D and are arranged along the X-direction. The tray transportunit 50 is disposed between the two transfer units 20A and 20B and thefour contact units 60A to 60D. Then, these units 20A and 20B, 50 and 60Ato 60D can be easily connected and separated by a coupler (connector)not shown in particular.

Therefore, the handler 10 of one or more embodiments is configured to becapable of increasing or decreasing the number of units arbitrarily inaccordance with the simultaneous measurement number, the test time, andthe like. Accordingly, as will be described later, the number of contactunits included in the handler 10 is not particularly limited to theabove described and can be set according to the number of test heads andthe like. The number of loader unit 20A and unloader unit 20B includedin the handler 10 is not particularly limited to the above described andcan be arbitrarily set according to the number of sockets on the testhead, the test time, and the like.

Hereinafter, the configurations of the transfer units 20A and 20B, thetray transport unit 50, and the contact units 60A to 60D that constitutethe handler 10 will be described in detail.

FIG. 4 is a cross-sectional view showing the internal structure of theloader unit in one or more embodiments. FIG. 5 is a front view showingthe internal structure of the loader unit and the unloader unit in oneor more embodiments and is a front view of the tray storage part seenalong the V-V line of FIG. 4 . FIG. 6 is a plan view showing the innerstructure of the loader unit in one or more embodiments and is a planview of the loader part seen along VI-VI line of FIG. 4 . FIG. 7 is aplan view showing a tray return device that returns empty test traysfrom the unloader unit to the loader unit in one or more embodiments.

As described above, the loader unit 20A is a unit that transfers theuntested DUTs 200 from the customer tray 100 to the test tray 110 andsupplies the test tray 110 to the tray transport unit 50. As shown inFIGS. 4 to 6 , the loader unit 20A includes a tray storage part 30 thatstores a plurality of customer trays 100, and a DUT transfer part (aloader part) 40A that transfers the DUTs 200 between the trays 100 and110.

On the other hand, the unloader unit 20B is a unit that receives thetest tray 110 that the tested DUTs 200 are mounted on from the traytransport unit 50 and transfers the DUTs 200 from the test tray 110 tothe customer tray 100. The unloader unit 20B also includes a traystorage part 30 that stores a plurality of customer trays 100, and a DUTtransfer part (an unloader part) 40B that transfers DUT200 between thetrays 110 and 100.

Since the loader unit 20A and the unloader unit 20B basically have thesame construction, the configuration of the loader unit 20A will bedescribed in detail below. The configuration of the unloader unit 20Bwill be described only with respect to the configuration different fromthat of the loader unit 20A.

The tray storage part 30 is a part of the loader unit 20A that stores aplurality of customer trays 100 and supplies the customer trays 100 tothe loader part 40A. As shown in FIGS. 4 and 5 , the tray storage part30 includes four stockers 31 and a tray transfer arm 32. The traytransfer arm 32 corresponds to the “second tray moving device” in one ormore embodiments of the present invention.

All of the four stockers 31 have the same structure, and each of thefour stockers 31 has a box-like shape capable of accommodating aplurality of customer trays 100 stacked on each other. An elevator 311for raising and lowering the stack of customer trays 100 is disposed atthe bottom of each stocker 31. A window portion (or window) 211 isdisposed above each stocker 31. The window portion 211 is formed on aboard (or substrate) 21 that partitions the tray storage part 30 and theloader part 40A in the loader unit 20A. By raising the customer tray 100stored in the stocker 31 by the elevator 311, the customer tray 100 canbe positioned in the loader part 40A via the window portions 211. Theelevator 311 corresponds to an example of the “first holding device” inone or more embodiments of the present invention.

In one or more embodiments, the four stockers 31 of the tray storagepart 30 of the loader unit 20A store the customer tray 100 containingthe untested DUTs 200. On the other hand, the four stockers 31 of thetray storage part 30 of the unloader unit 20B store the customer tray100 containing the tested DUTs 200.

An empty customer tray 100 on which no DUT 200 is mounted may be storedin a part of the stockers 31 of the loader unit 20A, or an emptycustomer tray 100 on which no DUT 200 is mounted may be stored in a partof the stockers 31 of the unloader unit 20B. The customer tray 100 onwhich the tested DUTs 200 are mounted may be stored in a part of thestockers 31 of the loader unit 20A by using a tray return arm 33 thatwill be described later.

In the handler 10, the stocker 31 storing a plurality of customer trays100 on which the untested DUTs 200 are mounted is set in the traystorage part 30 of the loader unit 20A, thereby the untested DUTs 200are carried into the handler 10 from the previous process. Further, inthe handler 10, the stocker 31 storing the plurality of customer trays100 on which the tested DUTs 200 are mounted are taken out from the traystorage part 30 of the unloader unit 20B, thereby the tested DUTs 200are carried out from the handler 10 to the next process.

The tray transfer arm 32 is a device that moves the customer tray 100between the four stockers 31 of the tray storage part 30 and includes arail 321 and a tray holding part 322. The rail 321 is disposed along theX direction. The tray holding part 322 has a holding claw that iscapable of holding the customer tray 100 and can move along the Xdirection on the rail 321.

In one or more embodiments, as described above, although the deviceframes 22 of the loader unit 20A and the unloader unit 20B areindependently separated from each other, the spaces of the tray storageparts 30 of the loader unit 20A and the unloader unit 20B are connectedto each other through the openings 221 of the device frames 22. Further,although each of the tray storage parts 30 of both the loader unit 20Aand the unloader unit 20B includes the tray transfer arm 32 describedabove, the rail 321 of the tray transfer arm 32 of the loader unit 20Ais longer than the rail 321 of the tray transfer arm 32 of the unloaderunit 20B. Then, the rail 321 of the tray transfer arm 32 of the loaderunit 20A enters the tray storage part 30 of the unloader unit 20Bthrough the openings 221 of the device frames 22, the end of the rail321 is located in the tray storage part 30 of the unloader unit 20B.

In one or more embodiments, the loader unit 20A and the unloader unit20B include a tray return arm 33. The tray return arm 33 is a devicethat moves the custom tray 100 between the tray storage parts 30 of theloader unit 20A and the unloader unit 20B. The tray return arm 33 isdisposed at the openings 221 of the device frames 22 so as to straddlethe tray storage parts 30 of the loader unit 20A and the unloader unit20B.

The tray return arm 33 includes a lifting device 331, an expandable arm332 and a tray holding part 333. The lifting device 331 is a device thatraises and lows the expandable arm 332. The expandable arm 332 is adevice that is capable of expanding and contracting along the Xdirection and is capable of moving the tray holding part 333 in the Xdirection, and the tray holding part 333 is capable of holding thecustomer tray 100. In the vertical direction (Z direction), theoperating range of the tray return arm 33 overlaps the operating rangeof the tray transfer arm 32 of the loader unit 20A and also overlaps theoperating range of the tray transfer arm 32 of the unloader unit 20B.The tray return arm 33 corresponds to an example of the “third traymoving device” in one or more embodiments of the present invention.

For example, in the loader unit 20A, in order to feed the customer tray100 stored in the stocker 31 to the loader part 40A, the elevator 311rises to position the customer tray 100 in the window portions 211.Then, when all of the DUTs 200 are transferred to the test tray 110 bythe pick and place device 41 of the loader part 40A and the customertray 100 becomes empty, the elevator 311 descends and the tray transferarm 32 holds the empty customer tray 100.

Then, the tray holding part 322 of the tray transfer arm 32 moves toabove the tray return arm 33, and the tray return arm 33 receives thecustomer tray 100 from the tray transfer arm 32. Next, the tray returnarm 33 moves below the tray transfer arm 32 of the unloader unit 20B,and the customer tray 100 is transferred from the tray return arm 33 tothe tray transfer arm 32. By the above operation, the empty customertray 100 is returned from the loader unit 20A to the unloader unit 20B.

The loader part 40A is a part of the loader unit 20A that transfers theDUT 200 from the customer tray 100 supplied from the tray storage part30 to the test tray 110 and supplies the test tray 110 to the traytransport unit 50. The loader part 40A is disposed above the traystorage part 30 and is disposed above the tray transport unit 50. Byemploying such an arrangement, it is possible to reduce the areaoccupied by the handler 10.

As shown in FIGS. 4 and 6 , the loader part 40A includes apick-and-place device 41, a posture changing device 42, and a verticaltransport device 46. The vertical transport device 46 corresponds to anexample of the “first tray moving device” in one or more embodiments ofthe present invention.

The pick-and-place device 41 includes a pair of Y-direction rails 411,an X-direction rail 412, and a movable head 413. The Y-direction rails411 are disposed along the Y-direction on the board 21 that partitionsthe tray storage part 30 and the loader part 40A in the loader unit 20A.The X-direction rail 412 is capable of moving along the Y-direction onthe Y-direction rails 411. The movable head 413 is capable of movingalong the X direction on the X direction rail 412. The movable head 413has a plurality of suction portions 414 each of which is capable ofsuction-holding the DUT 200.

The operating range of the pick-and-place device 41 includes four windowportions 211 formed on the board 21 and overlaps a part of the operatingrange of the posture changing device 42. Therefore, the pick-and-placedevice 41 can transfer the DUT 200 from the customer tray 100 located inthe window portions 211 to the test tray 110 located in the operationarea of the posture changing device 42. Incidentally, a buffer fortemporarily placing DUT200 or a prescier for positioning DUT200 may bedisposed between the window portion 211 and the posture changing device42.

The posture changing device 42 is a device that changes the posture ofthe test tray 110 between a horizontal state and a vertical state. Asshown in FIGS. 4 and 6 , the posture changing device 42 includes ahorizontal sliding device 43, a vertical sliding device 44, and ahorizontal moving device 45. The configuration of the posture changingdevice 42 is not particularly limited as long as it can change theposture of the test tray 110 between a horizontal state and a verticalstate. In order to facilitate understanding of the sliding devices 43and 44, the horizontal moving device 45 is not shown in FIG. 6 .

Here, concerning the posture of the test tray 110, the “horizontalstate” is a state in which the main surface 110 a of the test tray 110is substantially parallel to the horizontal direction (XY direction). Onthe other hand, the “vertical state” is a state in which the mainsurface 110 a of the test tray 110 is substantially parallel to thevertical direction (Z direction).

The horizontal sliding device 43 includes a pair of horizontal rails431, a slider 432, air cylinders 433, and insertion pieces 434.

The pair of horizontal rails 431 are disposed along the Y direction andare arranged substantially parallel to each other at an interval widerthan the width of the test tray 110. Each of the sliders 432 is slidablyprovided on the horizontal rail 431 and is capable of moving along the Ydirection on the horizontal rail 431 by an actuator such as an aircylinder (not shown in particular).

The air cylinder 433 is provided on the slider 432, and a cylindricalinsertion piece 434 is attached to the distal end of the movable shaftof the air cylinder 433. The air cylinders 433 are provided on theslider 432 so that the insertion pieces 434 face each other. The aircylinder 433 is capable of moving the insertion piece 434 forward andbackward along the X direction so that the insertion pieces 434 approachto and separate from each other by driving of the air cylinders 433.Instead of the air cylinder 433, other actuators such as a motor and aball screw mechanism may be used.

The vertical sliding device 44 also includes a pair of vertical rails441, sliders 442, air cylinders 443, and insertion pieces 444.

The pair of vertical rails 441 are disposed along the Z direction andare substantially parallel to each other at an interval wider than thewidth of the test tray 110. The vertical rails 441 are disposed near oneend of the horizontal rails 431 described above (left end in FIG. 4 ).Each of the sliders 442 is slidably provided on the vertical rail 441and is capable of moving along the Z direction on the vertical rail 441by an actuator such as an air cylinder (not shown) in particular.

The air cylinder 443 is provided on the slider 442, and a cylindricalinsertion piece 444 is attached to the distal end of the movable shaftof the air cylinder 443. The air cylinders 443 are provided on theslider 442 so that the insertion pieces 444 face each other. The aircylinder 443 is capable of moving the insertion piece 444 forward andbackward along the X direction so that the insertion pieces 444 approachto and separate from each other by driving of the air cylinders 443.Instead of the air cylinder 443, other actuators such as a motor and aball screw mechanism may be used.

Here, two recesses (or concave portions) 112 are formed on one sidesurface along the longitudinal direction of the test tray 110 of one ormore embodiments, and two recesses 112 are also formed on the other sidesurface. The four recesses 112 are disposed at four corners of the testtray 110. The pair of recesses 112 are disposed at corners near thefirst side 110 b of the test tray 110 and are opposed to each other. Onthe other hand, the other pair of recesses 112 are disposed at cornersnear the second side 110 c of the test tray and are opposed to eachother. The first side 110 b is one short side among the sidesconstituting the test tray 110, and the second side 110 c is the othershort side among the sides constituting the test tray 110. Each recess112 is recessed toward the inside of the test tray 110 and has acylindrical shape with an inner diameter into which the insertion piece434 and 444 described above can be inserted.

The posture changing operation of the test tray 110 using the slidedevices 43 and 44 is performed as follows.

That is, the horizontal sliding device 43 positions the slider 432 atthe right end of horizontal rail 431 in FIG. 4 and moves the movableaxis of the air cylinder 433 forward with respect to the test tray 110in the horizontal state, thereby the insertion pieces 434 are insertedinto the pair of recesses 112 of the second side 110 c side of the testtray 110. Similarly, the vertical sliding device 44 positions the slider442 at the lower end of the vertical rail 441 and moves the movable axisof the air cylinder 443 forward with respect to the test tray 110 in thehorizontal state, thereby the insertion pieces 444 are inserted into thepair of recesses 112 of the first side 110 b side of the test tray 110.

Next, the horizontal sliding device 43 moves the slider 432 toward theleft end of the horizontal rail 431 of FIG. 4 and the vertical slidingdevice 44 moves the slider 442 toward the upper end of the vertical rail441 at the same time. At this time, each of the insertion pieces 434 and444 has a cylindrical shape and relatively rotatable in the recess 112of the test tray 110. Therefore, in a state where the position of thefirst side 110 b of the test tray 110 is maintained (fixed) in thehorizontal direction and the position of the second side 110 c of thetest tray 110 is maintained (fixed) in the vertical direction, theposture of the test tray 110 can be changed from the horizontal state tothe vertical state by horizontally moving the second side 110 c whilethe first side 110 b is raised.

It is possible to change the posture of the test tray 110 in a smallspace by using such a sliding operation to change the posture of thetest tray 110. In one or more embodiments, since the posture of the testtray 110 is changed from the horizontal state to the vertical state inthe loader unit 20A, it is possible to supply the test tray 110 to thetray transport unit 50 in the vertical state.

The horizontal moving device 45 is a device that supplies the test tray110 to the vertical transport device 46 by moving the test tray 110vertically erected by the sliding devices 43 and 44 described above inthe horizontal direction (Y direction). The horizontal moving device 45includes clamps 451 and air cylinders 452. Each of the clamps 451 iscapable of moving forward and backward along the X direction by anactuator such as an air cylinder. The clamps 451 are capable contactinga pair of long sides of the test tray 110 and holding the test tray 110from both sides. Each of the air cylinders 452 is capable of moving theclamp 451 forward and backward along the Y direction. Instead of the aircylinder 452, other actuators such as a motor and a ball screw mechanismmay be used.

The vertical transport device 46 is a device that supplies a test tray110 changed into a vertical state to the tray transport unit 50 and isdisposed above the tray transport unit 50. The vertical transport device46 includes a pair of vertical rails 461, sliders 462, air cylinders463, and insertion pieces 464. The configuration of the verticaltransport device 46 is not particularly limited as long as it can conveythe test tray 110 in the vertical direction.

A pair of vertical rails 461 are disposed along the Z direction and aresubstantially parallel to each other at an interval wider than the widthof the test tray 110. Each of the slider 462 is slidably provided on thevertical rail 461 and is capable of moving along the Z direction on thevertical rail 461 by an actuator such as an air cylinder (not shown) inparticular.

The air cylinder 463 is provided on the slider 462, and a cylindricalinsertion piece 464 is attached to the distal end of the movable shaftof the air cylinder 463. The air cylinders 463 are provided on theslider 462 so that the insertion pieces 464 face each other. The aircylinder 463 is capable of moving the insertion piece 464 forward andbackward along the X direction so that the insertion pieces 464 approachto and separate from each other by driving of the air cylinders 463.Instead of the air cylinder 463, other actuators such as a motor and aball screw mechanism may be used.

When the test tray 110 is supplied to the vertical transport device 46by the horizontal moving device 45 in a state where the slider 462 ispositioned at the upper end of the vertical rail 461, the verticaltransport device 46 holds the test tray 110 by moving the movable axisof the air cylinder 463 forward and inserting the insertion pieces 464into the pair of recesses 112 of the first side 110 b side of the testtray 110. Next, the sliders 462 descend on the vertical rail 461,thereby the test tray 110 is conveyed in a vertical state and issupplied to the tray transport unit 50. In this manner, by supplying thetest tray 110 vertically from the loader unit 20A to the tray transportunit 50, it is possible to reduce the area occupied by the handler 10.

At this time, in one or more embodiments, the vertical transport device46 moves the test tray 110 along the longitudinal direction of the testtray 110. As a result, it is possible to narrow the widths of the loaderunit 20A and the unloader unit 20B and it is possible to further reducethe area occupied by the handler 10. Although not particularly limited,the ratio of the total length L in the longitudinal direction of thetest tray 110 with respect to the size W in the width direction of thetest tray 110 is preferably 105% or more (L/W≥105%), and the ratio ismore preferably 120% or more (L/W≥120%).

The unloader part 40B has the same configuration as the loader part 40Aand, although not particularly shown, includes a pick-and-place device41, a posture changing device 42, and a vertical transport device 46. Inthis unloader part 40B, the operation opposite to the operation of theloader part 40A is performed.

That is, the test tray 110 on which the tested DUTs 200 are mounted issupplied from the tray transport unit 50 to the unloader part 40B by thevertical transport device 46, and the posture of the test tray 110 ischanged from a vertical state to a horizontal state by the posturechanging device 42. Next, the tested DUTs 200 are transferred from thetest tray 110 to the customer tray 100 by a pick-and-place device 41. Atthis time, the DUTs 200 are classified according to the test result bytransferring the DUTs 200 from the test tray 110 to the customer tray100 according to the test result by the pick and place device 41.

Furthermore, as shown in FIG. 7 , the spaces of the loader part 40A andthe unloader part 40B of one or more embodiments are connected to eachother through an openings 231 respectively formed in the cases 23 of theloader unit 20A and the unloader unit 20B. The empty test tray 110 canbe moved from the unloader part 40B to the loader part 40A by the trayreturn devices 47 provided in each of the loader part 40A and theunloader part 40B. In order to facilitate understanding of the trayreturn device 47, the posture changing device 42 is omitted in FIG. 7 .

Each of the tray return devices 47 includes a horizontal rail 471provided below the posture changing device 42, an abutting head 472 thatis capable of moving along the X direction on the horizontal rail 471,and a pair of bearing rails 473 that slidably hold both ends of the testtray 110. In the unloader part 40B, the abutting head 472 slides on thehorizontal rail 471 and abuts and presses against the test tray 110,thereby the test tray 110 slides on the bearing rail 473 and moves alongthe X direction to move from the unloader part 40B to the loader part40A through the openings 231 of the cases 23. As a result, it ispossible to return the empty test tray 110 from the unloader unit 20B tothe loader unit 20A and circulate the test tray 110 in the handler 10.

The horizontal rail 471 and the abutting head 472 can be raised andlowered by an actuator such as an air cylinder (not shown in particular)so as not to interfere with the posture changing device 42 or the likewhen not in use. Similarly, the bearing rail 473 can be raised andlowered by another actuator.

FIG. 8 is a perspective view showing a tray transport unit and contactunits in one or more embodiments. FIG. 9 is a side view showing a traytransport unit in one or more embodiments. FIG. 10 is a front viewshowing a tray transport unit in one or more embodiments.

The tray transport unit 50 is a unit that transports the test tray 110between the contact unit 60A to 60D and the transfer unit 20A and 20B.The tray transport unit 50 moves the test tray 110 in a vertical statealong a direction substantially parallel to the main surface 110 a ofthe test tray 110. In this manner, the tray transport unit 50 transportsthe test tray 110 in the vertical state, thereby it is possible toreduce the area occupied by the handler 10.

As shown in FIG. 8 , the tray transport unit 50 includes device frames51A to 51D on each of which the rails 52 are laid, and a moving (ormovable) part 54 capable of moving on the rails 52 in the X direction.

The box-shaped device frames 51A to 51D are arranged along the Xdirection so as to face each of the four contact units 60A to 60D. Thefour device frames 51A to 51D have the same construction. As describedabove, the pair of rails 52 extending along the X direction is laid oneach of the device frame 51A to 51D.

The rails 52 of the device frame 51A to 51D adjacent to each other aredetachably connected by a coupler (connector) not shown in particular,and the moving part 54 is capable of facing all the contact unit 60A to60D by moving on the rail 52. Further, as shown in FIGS. 9 and 10 , eachof the device frames 51A to 51D includes a rack gear 53 provided alongthe rail 52. The rack gear 53 extends along the X direction and isdisposed substantially parallel to the rail 52.

As shown in FIGS. 9 and 10 , the moving part 54 includes a tray holdingdevice 55 that holds the test tray 110 in a vertical state, and adriving device 56 that moves the tray holding device 55 on the rail 52.The configuration of the tray holding device 55 is not particularlylimited as long as it is capable of holding the test tray 110 in avertical state and moving the test tray 110 forward and backward in theY direction.

The tray holding device 55 includes clamps 551, support frames 552, ahorizontal moving part 553, and a support plate 554. Each of the clamps551 is capable of moving forward and backward along the X direction byan actuator such as an air cylinder. The clamps 551 are capable ofcontacting a pair of long sides of the test tray 110 and holding thetest tray 110 from both sides. Each of the clamp 551 is supported by theL-shaped support frame 552 and is disposed at a height facing the testtray 110 positioned at the lowermost point of the vertical transportdevice 46 of the transfer units 20A and 20B and facing the accesssection 61 (described later) of the contact units 60A to 60D.

The support frames 552 are supported by the horizontal moving part 553.Further, the horizontal moving part 553 is supported by the supportplate 554 movably along the Y direction, and the horizontal moving part553 is capable of moving along the Y direction by an actuator such as anair cylinder (not shown in particular). Thereby, the tray holding device55 can move the test tray 110 held in the vertical state forward andbackward along the normal direction (Y direction) of the test tray 110.Then, the support plate 554 is capable of moving along the X directionon the rails 52 described above.

The driving device 56 includes a rotary motor 561 provided on thesupport plate 554 of the tray holding device 55. The rotary motor 561 isfixed to the lower surface of the support plate 554 via a flange 562.The pinion gear 564 is attached to the rotary shaft 563 of the rotarymotor 561. The pinion gear 564 is engaged with the above-described rackgears 53 provided on the device frames 51A to 51D. Therefore, it ispossible to move the moving part 54 on the rails 52 by driving therotary motor 561.

In this way, the driving device 56 is included in the moving part 54rather than the rails 52 of the device frames 51A to 51D side in one ormore embodiments. Therefore, since the device frame 51A to 51D havingthe rails 52 may be just added (or removed) in association with theaddition (or removal) of the contact unit and it is not necessary to adda change to the driving device 56, it is possible to easily achieve theaddition and removal of the tray transport unit 50.

When the test tray 110 on which the untested DUTs 200 are mounted issupplied by the vertical transport device 46 of the loader unit 20A, thetray transport unit 50 moves the tray holding device 55 along the Xdirection on the rail 52 by the driving device 56 so that the trayholding device 55 faces the test tray 110. Then, the horizontal movingpart 553 moves the support frames 552 forward, and the clamps 551 holdthe test tray 110 in a vertical state.

Next, after the horizontal moving part 553 moves the support frames 552backward, the test tray 110 is transported in a vertical state by movingthe tray holding device 55 along the X direction by the driving device56. Then, when the test tray 110 faces the target contact unit 60A to60D, the horizontally moving part 553 moves the support frames 552forward to supply the test tray 110 to the target contact unit 60A to60D.

On the other hand, when the test tray 110 on which the tested DUTs 200are mounted is carried out from the contact unit 60A to 60D, the traytransport unit 50 moves the tray holding device 55 along the X directionon the rails 52 by the driving device 56 so that the tray holding device55 faces the test tray 110. Then, the horizontal moving part 553 movesthe support frames 552 forward, and the clamps 551 hold the test tray110 in a vertical state.

Next, after the horizontal moving part 553 moves the support frames 552backward, the test tray 110 is transported in a vertical state by movingthe tray holding device 55 along the X direction by the driving device56. Then, when the test tray 110 faces the vertical transport device 46of the unloader unit 20B, the horizontal moving part 553 moves thesupport frames 552 forward to carry the test tray 110 to the unloaderunit 20B.

In this way, since the tray transport unit 50 transports the test tray110 in the vertical state, it is possible to reduce the area occupied bythe handler 10 in one or more embodiments.

FIG. 11 is a cross-sectional view showing an internal structure of thecontact unit in one or more embodiments. Since the four contact units60A to 60D have the same structure, the configuration of the contactunit 60A will be described in detail below, and the description of theconfiguration of the other contact units 60B to 60D will be omitted.

As shown in FIG. 11 , the contact unit 60A includes an access section(or portion) 61, a heat applying section 62 (or portion), a pressingsection (or portion) 63, and a heat removing section (or portion) 64.

In the access section 61, the test tray 110 is moved in and out of thecontact unit 60A by the tray transport unit 50. In the heat applyingsection 62, a predetermined thermal stress is applied to the untestedDUT 200 mounted on the test tray 110 supplied via the access section 61.In the pressing section 63, the DUT 200 is pressed to the socket 6 ofthe test head 5A, and the test of the DUT 200 is performed by the tester7. In the heat removing section 64, thermal stress is removed from thetested DUT 200.

The heat applying section 62 and the pressing section 63 are provided inthe first chamber 601 composed of a thermostatic chamber. A temperatureadjusting device 621A (see FIG. 3 ) is connected to the first chamber601. The temperature adjusting device 621A includes a heating device anda cooling device, and the temperature adjusting device 621A is capableof applying a high-temperature or low-temperature thermal stress to theDUT 200 located in the heat applying section 62 and the pressing section63 by adjusting the atmospheric temperature in the first chamber 601.Although not particularly limited, as a specific example of the heatingdevice of the temperature adjusting device 621A, for example, a heateror a hot air supplying device can be exemplified. As a specific exampleof the cooling device of the temperature adjusting device 621A, forexample, a refrigerant supply device that supplies liquid nitrogen canbe exemplified.

As described above, since the temperature adjusting devices 621A to 621Dare individually connected to the four contact units 60A to 60D, thecontact unit (e.g., the contact unit 60A) can adjust the temperatureenvironment in the first chamber 601 independently from the othercontact units (e.g., the contact units 60B to 60D). Each of thetemperature adjusting devices 621B to 621D has the same configuration asthe temperature adjusting device 621A described above.

As described above, the opening 63 a is formed in the first chamber 601.A portion of the test head 5A enters the pressing section 63 through theopening 63 a with the sockets 6 oriented in the horizontal direction.The pressing section 63 includes a pressing device 631 that is providedso as to face the sockets 6.

The pressing device 631 includes a pusher 632 that contacts the DUTs 200held on the test tray 110, and an actuator 633 that moves the pusher 632forward and backward along the Y direction. Although not particularlylimited, as an example of the actuator 633 a, a motor or the like havinga ball screw mechanism can be exemplified. The pressing device 631 iscapable of pressing the DUTs 200 to the sockets 6 in a state where theDUTs 200 are mounted on the test trays 110 in a vertical state bypressing the DUTs 200 in the horizontal direction.

In one or more embodiments, since each of the four contact units 60A to60D individually includes the pressing device 631, the contact unit(e.g., the contact units 60A) can press DUT200 to the sockets 6independently from the other contact units (e.g., the contact units 60Bto 60D).

On the other hand, the heat removing section 64 is provided in thesecond chamber 602 that is independent from the first chamber 601, andthe heat removing section 64 removes the heat stress from the DUT 200 byexposing the DUT 200 to the outside air. Therefore, a temperatureadjusting device that is capable of cooling is not connected to thesecond chamber 602. The second chamber 602 may have a heating devicesuch as a heater or a blower.

In one or more embodiments, the heat applying section 62, the accesssection 61, and the heat removing section 64 are arranged along thevertical direction. Further, the heat applying section 62, the pressingsection 63, and the heat removing section 64 are arranged along thevertical direction. In particular, the heat applying section 62 isdisposed below the access section 61 and is disposed below the pressingsection 63. On the other hand, the heat removing section 64 is disposedabove the access section 61 and is disposed above the pressing section63. Therefore, the access section 61 and the pressing section 63 aredisposed between the heat applying section 62 and the heat removingsection 64 and faces each other. It is possible to narrow the contactunits 60A to 60D and reduce the area occupied by the handler 10 byemploying such an arrangement.

Further, in one or more embodiments, the heat-applying section 62 thatis capable of cooling the DUT 200 is disposed at the lowermost portionof the contact unit 60A. Thus, it is possible to restrain the cold airfrom moving from the heat applying section 62 to the heat removingsection 64, it is possible to efficiently apply a thermal stress to theDUT 200 in the heat applying section 62. Further, since it is notnecessary to route the pipe of the temperature adjusting device 621A tothe upper portion of the contact unit 60A, it is also possible tosimplify the structure of the handler 10.

Then, the contact unit 60A includes a first vertical conveying device65, a first horizontal conveying device 66, a second vertical conveyingdevice 67, and a second horizontal conveying device 68.

The first vertical conveying device 65 corresponds to an example of the“seventh tray moving device” in one or more embodiments of the presentinvention, the first horizontal conveying device 66 corresponds to anexample of the “fifth tray moving device” in one or more embodiments ofthe present invention, the second vertical conveying device 67corresponds to an example of the “fourth tray moving device” in one ormore embodiments of the present invention, and the second horizontalconveying device 68 corresponds to an example of the “sixth tray movingdevice” in one or more embodiments of the present invention.

The first vertical conveying device 65 moves the test tray 110 on whichthe untested DUTs 200 are mounted from the access section 61 to the heatapplying section 62 and moves the test tray 110 on which the tested DUTs200 are mounted from the heat removing section 64 to the access section61. The first vertical conveying device 65 conveys the test tray 110 inthe −Z direction in a vertical state.

At this time, the first vertical conveying device 65 moves the test tray110 along the longitudinal direction of the test tray 110. As a result,it is possible to narrow the contact units 60A to 60D and further reducethe area occupied by the handler 10.

An opening 61 a is formed in the access section 61, and the traytransport unit 50 can deliver and receive the test tray 110 to and fromthe first vertical conveying device 65 through the opening 61 a. Whenthe test tray 110 on which the untested DUTs 200 are mounted is suppliedfrom the tray transport unit 50 to the access section 61 through theopening 61 a, the first vertical conveying device 65 moves the test tray110 in the −Z direction to supply the test tray 100 to the heat applyingsection 62.

The first horizontal conveying device 66 is provided in the heatapplying section 62, and the first horizontal conveying device 66receives the test tray 110 on which the untested DUTs 200 are mountedfrom the first vertical conveying device 65 and moves the test tray 110in the +Y direction. The first horizontal conveying device 66 moves thetest tray 110 along the normal direction of the test tray 110 in avertical state.

At this time, the first horizontal conveying device 66 moves the testtray 110 in a state where the longitudinal direction of the test tray110 is aligned in the vertical direction. As a result, it is possible tonarrow the contact units 60A to 60D and further reduce the area occupiedby the handler 10.

While the test tray 110 passes through the heat applying section 62 bythe first horizontal conveying device 66, a predetermined heat stress ofhigh temperature or low temperature is applied to the untested DUTs 200in a state where the untested DUTs 200 are mounted on the test tray 110.The +Y direction corresponds to an example of the “second direction” inone or more embodiments of the present invention.

The second vertical conveying device 67 moves the test tray 110 on whichthe untested DUTs 200 are mounted from the heat applying section 62 tothe pressing section 63 and moves the test tray 110 on which the testedDUTs 200 are mounted from the pressing section 63 to the heat removingsection 64. The second vertical conveying device 67 conveys the testtray 110 in the +Z direction in a vertical state.

At this time, the second vertical conveying device 67 moves the testtray 110 along the longitudinal direction of the test tray 110. As aresult, it is possible to narrow the contact units 60A to 60D andfurther reduce the area occupied by the handler 10.

When the second vertical conveying device 67 receives the test tray 110on which the untested DUT200 are mounted from the first horizontalconveying device 66, the second vertical conveying device 67 moves thetest tray 110 from the heat applying section 62 to the pressing section63. Then, when the test tray 110 faces the test head 5A, the pressingdevice 631 moves in the +Y direction to press the DUT 200 s to thesockets 6 in a state where the DUTs 200 are mounted on the test tray110. In this condition, the tests of the DUTs 200 are executed by thetester 7. When the tests are completed, the second vertical conveyingdevice 67 moves the test tray 110 on which the tested DUTs 200 aremounted in the +Z direction to supply the test tray 110 to the heatremoving section 64.

The second horizontal conveying device 68 is provided in the heatremoving section 64, and the second horizontal conveying device 68receives the test tray 110 on which the tested DUTs 200 are mounted fromthe second vertical conveying device 67 and moves the test tray 110 inthe −Y direction of FIG. 11 . The second horizontal conveying device 68moves the test tray 110 along the normal direction of the test tray 110in a vertical state.

At this time, the second horizontal conveying device 68 moves the testtray 110 in a state where the longitudinal direction of the test tray110 is aligned with the vertical direction. As a result, it is possibleto narrow the contact units 60A to 60D and further reduce the areaoccupied by the handler 10.

While the test tray 110 passes through the heat removing section 64 bythe second horizontal conveying device 68, thermal stress is removedfrom the tested DUTs 200 in a state where the tested DUTs 200 aremounted on the test tray 110. The −Y direction corresponds to an exampleof the “third direction” in one or more embodiments of the presentinvention.

When the test tray 110 passes through the heat removing section 64, thefirst vertical conveying device 65 receives the test tray 110 from thesecond horizontal conveying device 68 and moves the test tray 110 in the−Z direction to convey to the access section 61. The test tray 110 thatis returned to the access section 61 is carried out of the contact unit60A by the tray transport unit 50 through the opening 61 a.

Hereinafter, an example of configuring handlers having differentspecifications by adding or removing the contact units and the transferunits will be described with reference to FIGS. 12A to 13B.

FIG. 12 A is a diagram showing a handler configured to correspond to1024 simultaneous measurement number, and FIG. 12B is a diagram showinga handler configured to correspond to 768 simultaneous measurementnumber. FIG. 13A is a diagram showing a handler including two loaderunits, and FIG. 13B is a diagram showing a handler including twounloader units. FIG. 13A and FIG. 13B show a state in which the testhead 5A to 5D is removed from the contact units 60A to 60D.

In the above-described embodiments, a handler 10 configured tocorrespond to the tester 7 whose simultaneous measurement number is 1024has been described. As shown in FIG. 12A, the handler 10 includes fourcontact units 60A to 60D in order to correspond to four test heads 5A to5D connected to the tester 7.

On the other hand, when dealing with the tester 7B whose simultaneousmeasurement number smaller than the simultaneous measurement number ofthe tester 7, a handler 10B having specifications different from thoseof the handler 10 described above is configured. For example, thesimultaneous measurement number of the tester 7B is 768, and three testheads 5A to 5C are connected to the tester 7B. The handler 10Bcorresponding to the tester 7B has a configuration in which the contactunit 60D is removed from the handler 10. That is, the handler 10Bincludes three contact units 60A to 60C.

The simultaneous measurement number of the tester is not particularlylimited to the above, and may be, for example, 256 or 512. Although notparticularly limited, when the simultaneous measurement number of thetester is 256 and one test head is connected to the tester, a handlerhaving only one contact unit may be configured. On the other hand, whenthe simultaneous measurement number of the tester is 512 and two testheads are connected to the tester, a handler having two contact unitsmay be configured.

Further, although not shown in particular, when dealing with the testerof the simultaneous measurement number larger than the simultaneousmeasurement number of the tester 7, a handler to which the contact unitis added in accordance with the increased number of the test head isconfigured.

Further, for example, when the test time of the DUT 200 is short, ahandler 10C as shown in FIG. 13A may be configured. The handler 10C isdifferent from the handler 10 described above in that the handler 10Cincludes two loader unit 20A, but the rest of the configuration of thehandler 10C is similar to the handler 10.

Further, for example, when the number of test results to be classifiedis large, a handler 10D as shown in FIG. 13B may be configured. Thehandler 10D is different from the handler 10 described above in that thehandler 10D includes two unloader unit 20B, but the rest of theconfiguration of the handler 10D is similar to the handler 10.

As described above, in one or more embodiments, the handler 10 isconfigured so that the transfer units 20 and 20B and the contact units60A to 60D can be added to or removed from the handler 10. As a result,since it is possible to combine the optimum units for the user'srequirements to configure the handler 10, it is possible to optimize thespecification of the handler 10 at a low cost in response to the user'srequirements.

Further, since the handler 10 is configured so that the transfer units20A and 20B and the contact units 60A to 60D can be added to or removedfrom the handler 10, it is possible to solve the abnormality byreplacing the unit in which the abnormality has occurred with a newunit, and it is possible to improve the maintainability of the handler10.

Further, in one or more embodiments, since the handler 10 is configuredso that the contact units 60A to 60D can be added to or removed from thehandler 10, it is possible to optimize the number of contact units 60Ato 60D according to the of simultaneous measurement number, and it ispossible to reduce the space occupied by the handler 10.

In addition, since the conventional handler is not unitized, theadjustment of the apparatus can be performed only after the entireapparatus is assembled in the manufacturing process of the handler. Onthe other hand, in one or more embodiments, since the handler isunitized, it is possible to carry out the adjustments for each unit inparallel and it is possible to greatly shorten the manufacturing time ofthe handler.

In one or more embodiments, the handler 10 includes a plurality ofcontact units 60A to 60D, and each of the contact units 60A to 60D canadjust the temperature of the DUT 200 independently from the othercontact units 60A to 60D and press the DUT 200 to the socket 6 of thetest head 5A to 5D independently from the other contact units 60A to60D.

Therefore, it is possible to divide the number of the simultaneousmeasurements into a plurality of units, and the plurality of contactunits 60A to 60D can individually execute the tests for each of thedivision units. Accordingly, the number of the DUTs mounted per one testtray in the loader unit 20A is reduced, and the feeding operation to theindividual contact units 60A to 60D (transfer operation to the test tray110) is shortened, and as a result, it is possible to shorten thestandby time of the contact units 60A to 60D. Further, since it ispossible to reduce the probability of failure that occurs in the contactunits 60A to 60 by dividing the number of simultaneous measurements intoa plurality of units, it is possible to shorten the stop time of thehandler 10. Therefore, in one or more embodiments, it is possible toimprove the operation rate of the handler 10.

Embodiments heretofore explained are described to facilitateunderstanding of the present invention and are not described to limitthe present invention. It is therefore intended that the elementsdisclosed in the above embodiments include all design changes andequivalents to fall within the technical scope of the present invention.

For example, the handler 10 is configured so that the transfer unit20A,20B can be added to or removed from the handler 10 and the contactunit 60A˜60D can be added or to or removed from the handler 10 in theabove-described embodiments, but the handler is not particularly limitedthereto. For example, the handler 10 may be configured so that one ofthe transfer unit 20A and 20B or the contact unit 60A to 60D is added toor removed from the handler 10.

Although the tray transport unit 50 moves the test tray 110 in avertical state in the above-described embodiments, the posture of thetest tray 110 moved by the tray transport unit 50 is not particularlylimited thereto.

For example, the tray transport unit 50 may move the test tray 110 in ahorizontal state. More specifically, the tray transport unit 50 may movethe test tray 110 between the transfer units 20A and 20B and the contactunits 60A to 60D in a state where the main surface 110 a of the testtray 110 is substantially parallel to the horizontal direction.

In this case, the tray transfer units 20A and 20B do not include theposture changing device 42, the vertical transport device 46 may deliverand receive the test tray 110 to and from the tray transport unit 50 ina horizontal state.

Further, in the above-described cases, the conveying devices 65 to 68 ofthe contact unit 60A to 60D convey the test tray 110 in a horizontalstate, and the pressing device 631 of the contact unit 60A to 60Dpresses DUT200 vertically toward the socket 6 in a state where the testtray 110 is horizontally.

Although the disclosure has been described with respect to only alimited number of embodiments, those skilled in the art, having benefitof this disclosure, will appreciate that various other embodiments maybe devised without departing from the scope of the present invention.Accordingly, the scope of the invention should be limited only by theattached claims.

EXPLANATIONS OF LETTERS OR NUMERALS

-   -   1 . . . Electronic component testing apparatus    -   5A to 5D . . . Test head    -   10, 10B to 10D . . . Handler    -   20A, 20B . . . Loader unit, Unloader unit    -   30 . . . Tray storage part    -   31 . . . Stocker    -   311 . . . Elevator    -   32 . . . Tray transfer arm    -   33 . . . Tray return arm    -   40A, 40B . . . Loader part, Unloader part    -   42 . . . Posture changing device    -   43 . . . Horizontal sliding device    -   44 . . . Vertical sliding device    -   46 . . . Vertical transport device    -   50 . . . Tray transport unit    -   55 . . . Tray holding device    -   60A-60D . . . Contact unit    -   100 . . . Customer tray    -   110 . . . Test tray    -   110 b . . . First side    -   110 b . . . Second side    -   200 . . . DUT

What is claimed is:
 1. An electronic component handling apparatus thathandles a device under test (DUT), the electronic component handlingapparatus comprising: multiple transfer units that each comprise a DUTtransfer part that mounts the DUT on a first tray or that removes theDUT from the first tray; multiple contact units that each press the DUTmounted on the first tray against a socket disposed on a test headconnected to a tester; and a tray transporter that transports the firsttray between the multiple contact units and the multiple transfer units,wherein at least one of the multiple transfer units is removablydisposed on the electronic component handling apparatus.
 2. Theelectronic component handling apparatus according to claim 1, whereinthe DUT transfer part is disposed above the tray transporter.
 3. Theelectronic component handling apparatus according to claim 1, whereinthe multiple contact units are arranged along a first direction parallelto a horizontal direction of the electronic component handlingapparatus, the multiple transfer units are arranged along the firstdirection, and the tray transporter transports the first tray along thefirst direction.
 4. The electronic component handling apparatusaccording to claim 1, wherein the DUT transfer part comprises a firsttray moving device that delivers and receives the first tray in avertical state to and from the tray transporter.
 5. The electroniccomponent handling apparatus according to claim 4, wherein the firsttray moving device moves the first tray along a longitudinal directionof the first tray.
 6. The electronic component handling apparatusaccording to claim 4, wherein the tray transporter comprises a trayholding device that holds the first tray in the vertical state.
 7. Theelectronic component handling apparatus according to claim 1, whereinthe DUT transfer part comprises a posture changing device that changes aposture of the first tray between a horizontal state and a verticalstate.
 8. The electronic component handling apparatus according to claim1, each of the multiple transfer units comprises a tray storage thatstores a second tray, and the DUT transfer part transfers the DUTbetween the first tray and the second tray.
 9. The electronic componenthandling apparatus according to claim 8, wherein the DUT transfer partis disposed above the tray storage.
 10. The electronic componenthandling apparatus according to claim 8, wherein the tray storagecomprises: first holding devices that hold the second tray; and a secondtray moving device that moves the second tray between the first holdingdevices.
 11. The electronic component handling apparatus according toclaim 1, wherein the multiple transfer units include: a loader unit thatcomprises a loader part that transfers an untested DUT from a secondtray to the first tray; and an unloader unit that comprises an unloaderpart that transfers a tested DUT from the first tray to the second tray.12. The electronic component handling apparatus according to claim 11,wherein the number of loader units included in the electronic componenthandling apparatus is different from the number of unloader unitsincluded in the electronic component handling apparatus.
 13. Anelectronic component testing apparatus comprising: an electroniccomponent handling apparatus according to claim 1; test heads mounted tothe multiple contact units; and a tester electrically connected to thetest heads.
 14. The electronic component handling apparatus according toclaim 1, wherein at least one of the multiple contact units is removablydisposed on the electronic component handling apparatus.
 15. Anelectronic component handling apparatus that handles a device under test(DUT), the electronic component handling apparatus comprising: transferunits that each comprise a DUT transfer part that mounts the DUT on afirst tray or that removes the DUT from the first tray; contact unitsthat each press the DUT mounted on the first tray against a socketdisposed on a test head connected to a tester; and a tray transporterthat transports the first tray between the contact units and thetransfer units, wherein either or both of (i) at least one of thecontact units and (ii) at least one of the transfer units are removablydisposed on the electronic component handling apparatus, the DUTtransfer part comprises a posture changing device that changes a postureof the first tray between a horizontal state and a vertical state, andthe posture changing device changes the posture of the first tray byraising or lowering a first side of the first tray while horizontallymoving a second side facing the first side of the first tray whilemaintaining the position of the first side in the horizontal direction.16. An electronic component handling apparatus that handles a deviceunder test (DUT), the electronic component handling apparatuscomprising: transfer units that each comprise a DUT transfer part thatmounts the DUT on a first tray or that removes the DUT from the firsttray; contact units that each press the DUT mounted on the first trayagainst a socket disposed on a test head connected to a tester; and atray transporter that transports the first tray between the contactunits and the transfer units, wherein either or both of (i) at least oneof the contact units and (ii) at least one of the transfer units areremovably disposed on the electronic component handling apparatus, eachof the transfer units comprises a tray storage that stores a secondtray, the DUT transfer part transfers the DUT between the first tray andthe second tray, the tray storage comprises: first holding devices thathold the second tray; and a second tray moving device that moves thesecond tray between the first holding devices, the transfer unitsadjacent to each other comprise a third tray moving device that isdisposed between the tray storages and that moves the second tray, andan operating range of the third tray moving device vertically overlapsoperating ranges of the second tray moving devices of the transfer unitsadjacent to each other.
 17. An electronic component testing apparatuscomprising: an electronic component handling apparatus according toclaim 15; test heads mounted to the contact units; and a testerelectrically connected to the test heads.
 18. An electronic componenttesting apparatus comprising: an electronic component handling apparatusaccording to claim 16; test heads mounted to the contact units; and atester electrically connected to the test heads.